The objective of this thesis is the development of a fast and cost-effectiv fabricationprocess of tailored nanoantennas on a large scale. Therefore, a sophisticated nanosphere lithography technique has been established to create hexagonally arranged nanoantennas.To characterise the self-arranged nanosphere masks, a computer-controlled optical setup has been developed. This allows to determine the coverage of mono- and doublelayers, as well as the identification of sphere domains and their orientation. An additional heat plate is used for thermal mask modifications. Depending on the progress, theobserved colour of the sphere layers changes, which can be precisely used to monitorand stop the transformation.For the creation of tailored nanoparticles, a deposition chamber with a 2D sample goniometer stage has been developed. During the evaporation process the sample rotationand tilt can be automatically controlled and therefore the shape of the particles can betailored.Algorithms have been implemented to calculate the rotation- and tilt- angles for thegoniometer as well as to predict the 3D-shape of the resulting nanoparticles. This approach can be used to simulate the plasmonic characteristics of the obtained nanostructures.By means of TEM-EELS, the plasmonic properties of a V-shaped nanoparticles havebeen measured and match with the simulated ones.In the last part, a concept for the creation of segmented metasurfaces is presented,which enables the fabrication of plasmonic based flat optical devices.